FR1400

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Veriflo Division’s FR1400 Series regulators are tied diaphragm, single stage, pressure reducing regulators that offer high flow capability with an inlet pressure up to 3000 psig. They are an excellent choice for cylinder or point of use bulk and specialty gas applications.
The large, tied Hastelloy C-22® diaphragm provides stable control over its full operational range while providing a robust seal for hazardous gas applications.
The FR1400 Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new FR line will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Fab Installations
• Gas Companies

Product Features:
• 316L stainless steel body
• Manufactured for ultra high purity semiconductor gas applications
• Metal-to-metal diaphragm seal
• 10 μ in. Ra surface finish
• Passivated & electropolish
• Tied diaphragm design
• Hastelloy C-22® diaphragm standard
• Flow capacity: 0.5 Cv
• Flows up to 800 slpm (28 scfm)

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets
• “Point of Use” pressure regulation

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Part No.	Availability	Partner Available	Price	Diaphragm Material	Flow Coefficient	Number of Ports	Burst Pressure	Proof Pressure	Seat Retainer Material	Seat Material	Division	Outlet Pressure Rating	Maximum Inlet Pressure Rating	External Leak Rate	Body Material	Port Type	Poppet Material	Port Connection	Internal Leak Rate	Flow Coefficient (Cv)	Body Material	Outlet Pressure	Seat Material	Port Connection	Number of Ports	Maximum Inlet Pressure (psig)	Port Connection Type
FR1410HD5V2PFS6FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	3/8" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Female, Female	2	3000	3/8" Face Seal
FR1410HD5V2PFS6MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	3/8" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Male, Male	2	3000	3/8" Face Seal
FR1410HD5V2PFS8FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	1/2" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Female, Female	2	3000	1/2" Face Seal
FR1410HD5V2PFS8MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	1/2" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Male, Male	2	3000	1/2" Face Seal
FR1410HS5K2PFS6FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel	3/8" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Female, Female	2	3000	3/8" Face Seal
FR1410HS5K2PFS6MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel	3/8" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Male, Male	2	3000	3/8" Face Seal
FR1410HS5K2PFS8FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Female, Female	2	3000	1/2" Face Seal
FR1410HS5K2PFS8MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Male, Male	2	3000	1/2" Face Seal
FR1410HS5K2PTS8FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Tube Stub	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Female, Female	2	3000	1/2" Tube Stub
FR1410HS5K2PTS8MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	3000	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Tube Stub	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Male, Male	2	3000	1/2" Tube Stub
FR1410LD5V2PFS6FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	3/8" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Female, Female	2	300	3/8" Face Seal
FR1410LD5V2PFS6MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	3/8" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Male, Male	2	300	3/8" Face Seal
FR1410LD5V2PFS8FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	1/2" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Female, Female	2	300	1/2" Face Seal
FR1410LD5V2PFS8MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel Double Melt	1/2" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel Double Melt	10-100 psig	PCTFE	Male, Male	2	300	1/2" Face Seal
FR1410LS5K2PFS6FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel	3/8" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Female, Female	2	300	3/8" Face Seal
FR1410LS5K2PFS6MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel	3/8" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Male, Male	2	300	3/8" Face Seal
FR1410LS5K2PFS8FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Face Seal	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Female, Female	2	300	1/2" Face Seal
FR1410LS5K2PFS8MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Face Seal	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Male, Male	2	300	1/2" Face Seal
FR1410LS5K2PTS8FF	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Tube Stub	Hastelloy C-22®	Female, Female	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Female, Female	2	300	1/2" Tube Stub
FR1410LS5K2PTS8MM	Quote Required	Quote Required	TBD	Hastelloy C-22®	0.5	2	9,000 psig	4,500 psig	316L SS, Hastelloy C-22®	PCTFE	Veriflo Division	10-100 psig	300	2 x 10-10 scc/sec He	316L Stainless Steel	1/2" Tube Stub	Hastelloy C-22®	Male, Male	4 x 10-8 scc/sec He	0.5	316L Stainless Steel	10-100 psig	PCTFE	Male, Male	2	300	1/2" Tube Stub