Parker FR1410HS5K2PFS8FF - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1410HS5K2PFS8FF
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Products specifications
Attribute nameAttribute value
Outlet Pressure Rating10-100 psigMaximum Inlet Pressure Rating3000
Poppet MaterialHastelloy C-22®Port ConnectionFemale, Female
Internal Leak Rate4 x 10-8 scc/sec HeNumber of Ports2
Flow Coefficient0.5Diaphragm MaterialHastelloy C-22®
Body Material316L Stainless SteelExternal Leak Rate2 x 10-10 scc/sec He
Burst Pressure9,000 psigProof Pressure4,500 psig
Seat Retainer Material316L SS, Hastelloy C-22®Seat MaterialPCTFE
Port Type1/2" Face SealDivisionVeriflo Division
Maximum Inlet Pressure (psig)3000Body Material316L Stainless Steel
Port Connection Type1/2" Face SealFlow Coefficient (Cv)0.5
Outlet Pressure10-100 psigNumber of Ports2
Seat MaterialPCTFEPort ConnectionFemale, Female
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