Parker FR1410LD5V2PFS8MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1410LD5V2PFS8MM
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Products specifications
Attribute nameAttribute value
Outlet Pressure Rating10-100 psigMaximum Inlet Pressure Rating300
External Leak Rate2 x 10-10 scc/sec HeBody Material316L Stainless Steel Double Melt
Internal Leak Rate4 x 10-8 scc/sec HePoppet MaterialHastelloy C-22®
Flow Coefficient0.5Port ConnectionMale, Male
Diaphragm MaterialHastelloy C-22®Number of Ports2
Burst Pressure9,000 psigPort Type1/2" Face Seal
Proof Pressure4,500 psigSeat Retainer Material316L SS, Hastelloy C-22®
Seat MaterialPCTFEDivisionVeriflo Division
Port Connection Type1/2" Face SealPort ConnectionMale, Male
Flow Coefficient (Cv)0.5Body Material316L Stainless Steel Double Melt
Outlet Pressure10-100 psigMaximum Inlet Pressure (psig)300
Seat MaterialPCTFENumber of Ports2
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