Parker FR1410HD5V2PFS6MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1410HD5V2PFS6MM
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Products specifications
Attribute nameAttribute value
Body Material316L Stainless Steel Double MeltOutlet Pressure Rating10-100 psig
Burst Pressure9,000 psigExternal Leak Rate2 x 10-10 scc/sec He
Port Type3/8" Face SealInternal Leak Rate4 x 10-8 scc/sec He
Poppet MaterialHastelloy C-22®Maximum Inlet Pressure Rating3000
Flow Coefficient0.5Port ConnectionMale, Male
DivisionVeriflo DivisionSeat Retainer Material316L SS, Hastelloy C-22®
Proof Pressure4,500 psigNumber of Ports2
Seat MaterialPCTFEDiaphragm MaterialHastelloy C-22®
Port Connection Type3/8" Face SealMaximum Inlet Pressure (psig)3000
Port ConnectionMale, MaleOutlet Pressure10-100 psig
Seat MaterialPCTFENumber of Ports2
Body Material316L Stainless Steel Double MeltFlow Coefficient (Cv)0.5
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