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Parker FR1410HS5K2PTS8MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410HS5K2PTS8MM

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Products specifications

Attribute name	Attribute value
Poppet Material	Hastelloy C-22®	Internal Leak Rate	4 x 10-8 scc/sec He
Number of Ports	2	Diaphragm Material	Hastelloy C-22®
Body Material	316L Stainless Steel	Port Connection	Male, Male
Flow Coefficient	0.5	External Leak Rate	2 x 10-10 scc/sec He
Burst Pressure	9,000 psig	Seat Retainer Material	316L SS, Hastelloy C-22®
Division	Veriflo Division	Seat Material	PCTFE
Proof Pressure	4,500 psig	Maximum Inlet Pressure Rating	3000
Port Type	1/2" Tube Stub	Outlet Pressure Rating	10-100 psig
Port Connection Type	1/2" Tube Stub	Flow Coefficient (Cv)	0.5
Outlet Pressure	10-100 psig	Number of Ports	2
Seat Material	PCTFE	Port Connection	Male, Male
Body Material	316L Stainless Steel	Maximum Inlet Pressure (psig)	3000

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