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Parker FR1410HS5K2PFS6MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410HS5K2PFS6MM

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Products specifications

Attribute name	Attribute value
Seat Retainer Material	316L SS, Hastelloy C-22®	Division	Veriflo Division
Seat Material	PCTFE	Proof Pressure	4,500 psig
Body Material	316L Stainless Steel	Diaphragm Material	Hastelloy C-22®
Port Connection	Male, Male	Flow Coefficient	0.5
Number of Ports	2	External Leak Rate	2 x 10-10 scc/sec He
Burst Pressure	9,000 psig	Poppet Material	Hastelloy C-22®
Maximum Inlet Pressure Rating	3000	Outlet Pressure Rating	10-100 psig
Port Type	3/8" Face Seal	Internal Leak Rate	4 x 10-8 scc/sec He
Number of Ports	2	Flow Coefficient (Cv)	0.5
Port Connection Type	3/8" Face Seal	Seat Material	PCTFE
Body Material	316L Stainless Steel	Port Connection	Male, Male
Maximum Inlet Pressure (psig)	3000	Outlet Pressure	10-100 psig

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