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Parker FR1410HS5K2PTS8FF - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410HS5K2PTS8FF

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Products specifications

Attribute name	Attribute value
External Leak Rate	2 x 10-10 scc/sec He	Burst Pressure	9,000 psig
Port Connection	Female, Female	Poppet Material	Hastelloy C-22®
Internal Leak Rate	4 x 10-8 scc/sec He	Maximum Inlet Pressure Rating	3000
Outlet Pressure Rating	10-100 psig	Port Type	1/2" Tube Stub
Division	Veriflo Division	Body Material	316L Stainless Steel
Seat Retainer Material	316L SS, Hastelloy C-22®	Seat Material	PCTFE
Proof Pressure	4,500 psig	Diaphragm Material	Hastelloy C-22®
Number of Ports	2	Flow Coefficient	0.5
Port Connection	Female, Female	Seat Material	PCTFE
Body Material	316L Stainless Steel	Maximum Inlet Pressure (psig)	3000
Outlet Pressure	10-100 psig	Port Connection Type	1/2" Tube Stub
Number of Ports	2	Flow Coefficient (Cv)	0.5

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