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Parker FR1410HS5K2PFS6FF - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410HS5K2PFS6FF

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Products specifications

Attribute name	Attribute value
Port Type	3/8" Face Seal	Internal Leak Rate	4 x 10-8 scc/sec He
Poppet Material	Hastelloy C-22®	Maximum Inlet Pressure Rating	3000
Port Connection	Female, Female	Number of Ports	2
Flow Coefficient	0.5	Diaphragm Material	Hastelloy C-22®
Proof Pressure	4,500 psig	Seat Retainer Material	316L SS, Hastelloy C-22®
Division	Veriflo Division	Body Material	316L Stainless Steel
Seat Material	PCTFE	Outlet Pressure Rating	10-100 psig
Burst Pressure	9,000 psig	External Leak Rate	2 x 10-10 scc/sec He
Maximum Inlet Pressure (psig)	3000	Body Material	316L Stainless Steel
Outlet Pressure	10-100 psig	Seat Material	PCTFE
Number of Ports	2	Port Connection	Female, Female
Flow Coefficient (Cv)	0.5	Port Connection Type	3/8" Face Seal

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