Parker FR1410LS5K2PFS6MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1410LS5K2PFS6MM
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Products specifications
Attribute nameAttribute value
Burst Pressure9,000 psigExternal Leak Rate2 x 10-10 scc/sec He
Seat Retainer Material316L SS, Hastelloy C-22®Proof Pressure4,500 psig
Poppet MaterialHastelloy C-22®Maximum Inlet Pressure Rating300
Outlet Pressure Rating10-100 psigPort Type3/8" Face Seal
Internal Leak Rate4 x 10-8 scc/sec HeDivisionVeriflo Division
Seat MaterialPCTFEBody Material316L Stainless Steel
Port ConnectionMale, MaleNumber of Ports2
Flow Coefficient0.5Diaphragm MaterialHastelloy C-22®
Seat MaterialPCTFENumber of Ports2
Port ConnectionMale, MaleBody Material316L Stainless Steel
Port Connection Type3/8" Face SealOutlet Pressure10-100 psig
Maximum Inlet Pressure (psig)300Flow Coefficient (Cv)0.5
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