Parker FR1410HS5K2PFS8MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1410HS5K2PFS8MM
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Products specifications
Attribute nameAttribute value
Number of Ports2Flow Coefficient0.5
Port ConnectionMale, MaleDiaphragm MaterialHastelloy C-22®
Port Type1/2" Face SealProof Pressure4,500 psig
Seat Retainer Material316L SS, Hastelloy C-22®DivisionVeriflo Division
Body Material316L Stainless SteelSeat MaterialPCTFE
Outlet Pressure Rating10-100 psigBurst Pressure9,000 psig
External Leak Rate2 x 10-10 scc/sec HeInternal Leak Rate4 x 10-8 scc/sec He
Maximum Inlet Pressure Rating3000Poppet MaterialHastelloy C-22®
Outlet Pressure10-100 psigNumber of Ports2
Seat MaterialPCTFEFlow Coefficient (Cv)0.5
Port Connection Type1/2" Face SealMaximum Inlet Pressure (psig)3000
Body Material316L Stainless SteelPort ConnectionMale, Male
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