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Parker FR1410LD5V2PFS6MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410LD5V2PFS6MM

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Products specifications

Attribute name	Attribute value
Poppet Material	Hastelloy C-22®	Internal Leak Rate	4 x 10-8 scc/sec He
Outlet Pressure Rating	10-100 psig	Maximum Inlet Pressure Rating	300
Port Connection	Male, Male	Port Type	3/8" Face Seal
Division	Veriflo Division	Seat Retainer Material	316L SS, Hastelloy C-22®
Seat Material	PCTFE	Proof Pressure	4,500 psig
Diaphragm Material	Hastelloy C-22®	Number of Ports	2
Flow Coefficient	0.5	External Leak Rate	2 x 10-10 scc/sec He
Body Material	316L Stainless Steel Double Melt	Burst Pressure	9,000 psig
Port Connection	Male, Male	Maximum Inlet Pressure (psig)	300
Outlet Pressure	10-100 psig	Number of Ports	2
Flow Coefficient (Cv)	0.5	Body Material	316L Stainless Steel Double Melt
Port Connection Type	3/8" Face Seal	Seat Material	PCTFE

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