FR1400

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Veriflo Division’s FR1400 Series regulators are tied diaphragm, single stage, pressure reducing regulators that offer high flow capability with an inlet pressure up to 3000 psig. They are an excellent choice for cylinder or point of use bulk and specialty gas applications.
The large, tied Hastelloy C-22® diaphragm provides stable control over its full operational range while providing a robust seal for hazardous gas applications.
The FR1400 Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new FR line will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Fab Installations
• Gas Companies

Product Features:
• 316L stainless steel body
• Manufactured for ultra high purity semiconductor gas applications
• Metal-to-metal diaphragm seal
• 10 μ in. Ra surface finish
• Passivated & electropolish
• Tied diaphragm design
• Hastelloy C-22® diaphragm standard
• Flow capacity: 0.5 Cv
• Flows up to 800 slpm (28 scfm)

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets
• “Point of Use” pressure regulation

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Part No.	Availability	Partner Available	Price	Body Material	External Leak Rate	Burst Pressure	Poppet Material	Port Type	Internal Leak Rate	Port Connection	Maximum Inlet Pressure Rating	Flow Coefficient	Outlet Pressure Rating	Proof Pressure	Seat Retainer Material	Division	Diaphragm Material	Number of Ports	Seat Material	Port Connection Type	Maximum Inlet Pressure (psig)	Outlet Pressure	Seat Material	Port Connection	Number of Ports	Flow Coefficient (Cv)	Body Material
FR1415HD5V2PFS6FF	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Female, Female	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	3000	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel Double Melt
FR1415HD5V2PFS6MM	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Male, Male	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	3000	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel Double Melt
FR1415HD5V2PFS8FF	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Female, Female	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	3000	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel Double Melt
FR1415HD5V2PFS8MM	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Male, Male	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	3000	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel Double Melt
FR1415HS5K2PFS6FF	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Female, Female	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	3000	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel
FR1415HS5K2PFS6MM	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Male, Male	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	3000	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel
FR1415HS5K2PFS8FF	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Female, Female	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	3000	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel
FR1415HS5K2PFS8MM	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Male, Male	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	3000	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel
FR1415HS5K2PTS8FF	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Tube Stub	4 x 10-8 scc/sec He	Female, Female	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Tube Stub	3000	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel
FR1415HS5K2PTS8MM	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Tube Stub	4 x 10-8 scc/sec He	Male, Male	3000	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Tube Stub	3000	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel
FR1415LD5V2PFS6FF	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Female, Female	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	300	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel Double Melt
FR1415LD5V2PFS6MM	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Male, Male	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	300	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel Double Melt
FR1415LD5V2PFS8FF	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Female, Female	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	300	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel Double Melt
FR1415LD5V2PFS8MM	Quote Required	Quote Required	TBD	316L Stainless Steel Double Melt	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Male, Male	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	300	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel Double Melt
FR1415LS5K2PFS6FF	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Female, Female	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	300	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel
FR1415LS5K2PFS6MM	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	3/8" Face Seal	4 x 10-8 scc/sec He	Male, Male	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	3/8" Face Seal	300	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel
FR1415LS5K2PFS8FF	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Female, Female	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	300	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel
FR1415LS5K2PFS8MM	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Face Seal	4 x 10-8 scc/sec He	Male, Male	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Face Seal	300	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel
FR1415LS5K2PTS8FF	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Tube Stub	4 x 10-8 scc/sec He	Female, Female	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Tube Stub	300	15-150 psig	PCTFE	Female, Female	2	0.5	316L Stainless Steel
FR1415LS5K2PTS8MM	Quote Required	Quote Required	TBD	316L Stainless Steel	2 x 10-10 scc/sec He	9,000 psig	Hastelloy C-22®	1/2" Tube Stub	4 x 10-8 scc/sec He	Male, Male	300	0.5	15-150 psig	4,500 psig	316L SS, Hastelloy C-22®	Veriflo Division	Hastelloy C-22®	2	PCTFE	1/2" Tube Stub	300	15-150 psig	PCTFE	Male, Male	2	0.5	316L Stainless Steel