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FR1400

Picture for category FR1400

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Veriflo Division’s FR1400 Series regulators are tied diaphragm, single stage, pressure reducing regulators that offer high flow capability with an inlet pressure up to 3000 psig. They are an excellent choice for cylinder or point of use bulk and specialty gas applications.
The large, tied Hastelloy C-22® diaphragm provides stable control over its full operational range while providing a robust seal for hazardous gas applications.
The FR1400 Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new FR line will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Fab Installations
• Gas Companies

Product Features:
• 316L stainless steel body
• Manufactured for ultra high purity semiconductor gas applications
• Metal-to-metal diaphragm seal
• 10 μ in. Ra surface finish
• Passivated & electropolish
• Tied diaphragm design
• Hastelloy C-22® diaphragm standard
• Flow capacity: 0.5 Cv
• Flows up to 800 slpm (28 scfm)

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets
• “Point of Use” pressure regulation
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ActionPart No.AvailabilityPartner AvailablePriceProof PressureSeat Retainer MaterialSeat MaterialDivisionDiaphragm MaterialFlow CoefficientNumber of PortsBody MaterialOutlet Pressure RatingExternal Leak RateBurst PressurePoppet MaterialPort ConnectionPort TypeInternal Leak RateMaximum Inlet Pressure RatingSeat MaterialPort ConnectionNumber of PortsFlow Coefficient (Cv)Body MaterialPort Connection TypeMaximum Inlet Pressure (psig)Outlet Pressure
FR1403HD5V2PFS6FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female3/8" Face Seal4 x 10-8 scc/sec He3000PCTFEFemale, Female20.5316L Stainless Steel Double Melt3/8" Face Seal30001-30 psig
FR1403HD5V2PFS6MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male3/8" Face Seal4 x 10-8 scc/sec He3000PCTFEMale, Male20.5316L Stainless Steel Double Melt3/8" Face Seal30001-30 psig
FR1403HD5V2PFS8FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female1/2" Face Seal4 x 10-8 scc/sec He3000PCTFEFemale, Female20.5316L Stainless Steel Double Melt1/2" Face Seal30001-30 psig
FR1403HD5V2PFS8MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male1/2" Face Seal4 x 10-8 scc/sec He3000PCTFEMale, Male20.5316L Stainless Steel Double Melt1/2" Face Seal30001-30 psig
FR1403HS5K2PFS6FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female3/8" Face Seal4 x 10-8 scc/sec He3000PCTFEFemale, Female20.5316L Stainless Steel3/8" Face Seal30001-30 psig
FR1403HS5K2PFS6MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male3/8" Face Seal4 x 10-8 scc/sec He3000PCTFEMale, Male20.5316L Stainless Steel3/8" Face Seal30001-30 psig
FR1403HS5K2PFS8FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female1/2" Face Seal4 x 10-8 scc/sec He3000PCTFEFemale, Female20.5316L Stainless Steel1/2" Face Seal30001-30 psig
FR1403HS5K2PFS8MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male1/2" Face Seal4 x 10-8 scc/sec He3000PCTFEMale, Male20.5316L Stainless Steel1/2" Face Seal30001-30 psig
FR1403HS5K2PTS8FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female1/2" Tube Stub4 x 10-8 scc/sec He3000PCTFEFemale, Female20.5316L Stainless Steel1/2" Tube Stub30001-30 psig
FR1403HS5K2PTS8MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male1/2" Tube Stub4 x 10-8 scc/sec He3000PCTFEMale, Male20.5316L Stainless Steel1/2" Tube Stub30001-30 psig
FR1403LD5V2PFS6FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female3/8" Face Seal4 x 10-8 scc/sec He300PCTFEFemale, Female20.5316L Stainless Steel Double Melt3/8" Face Seal3001-30 psig
FR1403LD5V2PFS6MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male3/8" Face Seal4 x 10-8 scc/sec He300PCTFEMale, Male20.5316L Stainless Steel Double Melt3/8" Face Seal3001-30 psig
FR1403LD5V2PFS8FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female1/2" Face Seal4 x 10-8 scc/sec He300PCTFEFemale, Female20.5316L Stainless Steel Double Melt1/2" Face Seal3001-30 psig
FR1403LD5V2PFS8MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel Double Melt1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male1/2" Face Seal4 x 10-8 scc/sec He300PCTFEMale, Male20.5316L Stainless Steel Double Melt1/2" Face Seal3001-30 psig
FR1403LS5K2PFS6FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female3/8" Face Seal4 x 10-8 scc/sec He300PCTFEFemale, Female20.5316L Stainless Steel3/8" Face Seal3001-30 psig
FR1403LS5K2PFS6MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male3/8" Face Seal4 x 10-8 scc/sec He300PCTFEMale, Male20.5316L Stainless Steel3/8" Face Seal3001-30 psig
FR1403LS5K2PFS8FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female1/2" Face Seal4 x 10-8 scc/sec He300PCTFEFemale, Female20.5316L Stainless Steel1/2" Face Seal3001-30 psig
FR1403LS5K2PFS8MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male1/2" Face Seal4 x 10-8 scc/sec He300PCTFEMale, Male20.5316L Stainless Steel1/2" Face Seal3001-30 psig
FR1403LS5K2PTS8FF
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Female, Female1/2" Tube Stub4 x 10-8 scc/sec He300PCTFEFemale, Female20.5316L Stainless Steel1/2" Tube Stub3001-30 psig
FR1403LS5K2PTS8MM
Quote Required
Quote Required
TBD
4,500 psig316L SS, Hastelloy C-22®PCTFEVeriflo DivisionHastelloy C-22®0.52316L Stainless Steel1-30 psig2 x 10-10 scc/sec He9,000 psigHastelloy C-22®Male, Male1/2" Tube Stub4 x 10-8 scc/sec He300PCTFEMale, Male20.5316L Stainless Steel1/2" Tube Stub3001-30 psig