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Parker FR1403LD5V2PFS8MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1403LD5V2PFS8MM

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Products specifications

Attribute name	Attribute value
Internal Leak Rate	4 x 10-8 scc/sec He	Poppet Material	Hastelloy C-22®
Maximum Inlet Pressure Rating	300	Seat Material	PCTFE
Division	Veriflo Division	Port Type	1/2" Face Seal
Proof Pressure	4,500 psig	Seat Retainer Material	316L SS, Hastelloy C-22®
Flow Coefficient	0.5	Port Connection	Male, Male
Diaphragm Material	Hastelloy C-22®	Number of Ports	2
Outlet Pressure Rating	1-30 psig	External Leak Rate	2 x 10-10 scc/sec He
Body Material	316L Stainless Steel Double Melt	Burst Pressure	9,000 psig
Port Connection	Male, Male	Outlet Pressure	1-30 psig
Maximum Inlet Pressure (psig)	300	Number of Ports	2
Flow Coefficient (Cv)	0.5	Body Material	316L Stainless Steel Double Melt
Port Connection Type	1/2" Face Seal	Seat Material	PCTFE

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