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Parker FR1403LD5V2PFS6MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1403LD5V2PFS6MM

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Products specifications

Attribute name	Attribute value
Poppet Material	Hastelloy C-22®	Port Type	3/8" Face Seal
Internal Leak Rate	4 x 10-8 scc/sec He	Diaphragm Material	Hastelloy C-22®
Number of Ports	2	Flow Coefficient	0.5
Port Connection	Male, Male	External Leak Rate	2 x 10-10 scc/sec He
Burst Pressure	9,000 psig	Division	Veriflo Division
Seat Retainer Material	316L SS, Hastelloy C-22®	Seat Material	PCTFE
Proof Pressure	4,500 psig	Maximum Inlet Pressure Rating	300
Body Material	316L Stainless Steel Double Melt	Outlet Pressure Rating	1-30 psig
Outlet Pressure	1-30 psig	Flow Coefficient (Cv)	0.5
Body Material	316L Stainless Steel Double Melt	Maximum Inlet Pressure (psig)	300
Seat Material	PCTFE	Number of Ports	2
Port Connection	Male, Male	Port Connection Type	3/8" Face Seal

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