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Parker FR1410HD5V2PFS6FF - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410HD5V2PFS6FF

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Products specifications

Attribute name	Attribute value
Diaphragm Material	Hastelloy C-22®	Flow Coefficient	0.5
Number of Ports	2	Burst Pressure	9,000 psig
Proof Pressure	4,500 psig	Seat Retainer Material	316L SS, Hastelloy C-22®
Seat Material	PCTFE	Division	Veriflo Division
Outlet Pressure Rating	10-100 psig	Maximum Inlet Pressure Rating	3000
External Leak Rate	2 x 10-10 scc/sec He	Body Material	316L Stainless Steel Double Melt
Port Type	3/8" Face Seal	Poppet Material	Hastelloy C-22®
Port Connection	Female, Female	Internal Leak Rate	4 x 10-8 scc/sec He
Flow Coefficient (Cv)	0.5	Body Material	316L Stainless Steel Double Melt
Outlet Pressure	10-100 psig	Seat Material	PCTFE
Port Connection	Female, Female	Number of Ports	2
Maximum Inlet Pressure (psig)	3000	Port Connection Type	3/8" Face Seal

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