Parker FR1410HD5V2PFS8MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1410HD5V2PFS8MM
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Products specifications
Attribute nameAttribute value
External Leak Rate2 x 10-10 scc/sec HeBurst Pressure9,000 psig
Proof Pressure4,500 psigSeat Retainer Material316L SS, Hastelloy C-22®
Seat MaterialPCTFEDivisionVeriflo Division
Port Type1/2" Face SealOutlet Pressure Rating10-100 psig
Maximum Inlet Pressure Rating3000Body Material316L Stainless Steel Double Melt
Poppet MaterialHastelloy C-22®Internal Leak Rate4 x 10-8 scc/sec He
Diaphragm MaterialHastelloy C-22®Number of Ports2
Flow Coefficient0.5Port ConnectionMale, Male
Seat MaterialPCTFENumber of Ports2
Maximum Inlet Pressure (psig)3000Port ConnectionMale, Male
Port Connection Type1/2" Face SealFlow Coefficient (Cv)0.5
Body Material316L Stainless Steel Double MeltOutlet Pressure10-100 psig
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