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Parker FR1410LS5K2PFS8FF - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410LS5K2PFS8FF

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Products specifications

Attribute name	Attribute value
Port Connection	Female, Female	Internal Leak Rate	4 x 10-8 scc/sec He
Poppet Material	Hastelloy C-22®	Flow Coefficient	0.5
Diaphragm Material	Hastelloy C-22®	Number of Ports	2
Burst Pressure	9,000 psig	Port Type	1/2" Face Seal
Seat Material	PCTFE	Division	Veriflo Division
Body Material	316L Stainless Steel	Proof Pressure	4,500 psig
Seat Retainer Material	316L SS, Hastelloy C-22®	Outlet Pressure Rating	10-100 psig
Maximum Inlet Pressure Rating	300	External Leak Rate	2 x 10-10 scc/sec He
Body Material	316L Stainless Steel	Flow Coefficient (Cv)	0.5
Outlet Pressure	10-100 psig	Maximum Inlet Pressure (psig)	300
Port Connection	Female, Female	Seat Material	PCTFE
Number of Ports	2	Port Connection Type	1/2" Face Seal

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