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Parker FR1410HD5V2PFS8FF - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1410HD5V2PFS8FF

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Products specifications

Attribute name	Attribute value
Internal Leak Rate	4 x 10-8 scc/sec He	Division	Veriflo Division
Seat Material	PCTFE	Diaphragm Material	Hastelloy C-22®
Number of Ports	2	Flow Coefficient	0.5
External Leak Rate	2 x 10-10 scc/sec He	Body Material	316L Stainless Steel Double Melt
Proof Pressure	4,500 psig	Port Type	1/2" Face Seal
Burst Pressure	9,000 psig	Seat Retainer Material	316L SS, Hastelloy C-22®
Port Connection	Female, Female	Poppet Material	Hastelloy C-22®
Outlet Pressure Rating	10-100 psig	Maximum Inlet Pressure Rating	3000
Outlet Pressure	10-100 psig	Number of Ports	2
Flow Coefficient (Cv)	0.5	Body Material	316L Stainless Steel Double Melt
Port Connection Type	1/2" Face Seal	Port Connection	Female, Female
Seat Material	PCTFE	Maximum Inlet Pressure (psig)	3000

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