Ultra-High Purity (UHP) Surface Mount Tied-diaphragm Pressure Regulator – SMSQ2Micro Series

The SMSQ2Micro and SMSQ2Micro130E series are the most advanced miniature UHP pressure regulators on the market. The series provide extremely precise and reliable pressure control that enhances MFC (Mass Flow Controller) performance vital to semiconductor production repeatability and yield. The series also provides superior leak integrity and low particle generation, both essential to semiconductor applications.

The regulators are suitable for use with both inert and corrosive gases, and provide extraordinary response to step-function flow demand changes. The series utilizes a unique self-centering tied-diaphragm design that provides reliable seat sealing and pressure regulation. Particle generation and entrapment is minimized by eliminating the poppet spring and seat retention threads which further improves process cleanliness and purging performance.

The SMSQ2Micro Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance, leak integrity, and maximum cycle life at inlet pressure up to 250 psig. The body is internally electropolished and manufactured from Parker Veriflo’s proprietary Vericlean™ 316L stainless steel that exceeds Semi F20 material requirements, each diaphragm and poppet are manufactured from Hastelloy C-22®, and each seat is available in either PCTFE or Vespel®.

Both the SMSQ2Micro and SMSQ2Micro130E feature a small footprint surface mount footprint per SEMI Modular Interface Specifications and is available in both c-seal and w-seal configurations.

All SMSQ2Micro and SMSQ2Micro130E regulators are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, the internal (seat) seal and external metal seals are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features and Benefits:
• Available in C and W seal surface mount 1-1/8 inch and 1-1/2 inch body sizes
• Extremely low particle counts
• Tied-diaphragm eliminates springs in wetted area and enhances safety
• Flow Capacity (Cv): 0.06 (SMSQ2Micro), 0.15 (SMSQ2Micro130E)
• Outlet pressure range: -10 psig to 60 psig
• Internal leak rate: ≤ 5 x 10-8 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 5 microinch (Ra) electropolish surface finish
• -40°F to +150° F (-40°C to +66°C) operating temperature range

VeriClean – TM Parker Hannifin Corporation, Veriflo Division
Vespel – TM DuPont Performance Elastomers L.L.C.