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Parker SMSQ2MICRO130E60102 - Ultra-High Purity (UHP) Surface Mount Tied-diaphragm Pressure Regulator – SMSQ2Micro Series

SMSQ2Micro Series pressure regulators are designed for UHP applications requiring precision pressure control in a small envelope. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.

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Brand Parker

Part No. SMSQ2MICRO130E60102

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Products specifications

Attribute name	Attribute value
Division	Veriflo Division	Body Size	surface mount: 1-1/8"
Port Type	C-Seal	Pressure Range (psig)	60 psig
Flow Capacity (Cv)	0.15

Product resources

Literature and Reference Materials

Semiconductor Regulator Selection White Paper (PDF)
Veriflo Pressure Regulators - Installation, Operation and Recycling Guide (PDF)
Veriflo CAD File Locator Guide (PDF)
Veriflo Product Selection & Operation Safety Guide (PDF)