*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Parker SMSQ2MICRO130E30602 - Ultra-High Purity (UHP) Surface Mount Tied-diaphragm Pressure Regulator – SMSQ2Micro Series

SMSQ2Micro Series pressure regulators are designed for UHP applications requiring precision pressure control in a small envelope. The product’s advanced performance and specifications makes it ideal for use in critical semiconductor tool operations.

Availability:	Quote Required
Partner Available:	Quote Required

Brand Parker

Part No. SMSQ2MICRO130E30602

Ship to

Shipping Method

Estimated Delivery

Price

No shipping options

Products specifications

Attribute name	Attribute value
Division	Veriflo Division	Flow Capacity (Cv)	0.15
Pressure Range (psig)	30 psig	Port Type	W-seal
Body Size	surface mount: 1-1/8"

Product resources

Literature and Reference Materials

Veriflo CAD File Locator Guide (PDF)
Veriflo Pressure Regulators - Installation, Operation and Recycling Guide (PDF)
Semiconductor Regulator Selection White Paper (PDF)
Veriflo Product Selection & Operation Safety Guide (PDF)