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Parker FR1003D15V2PFSFFTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D15V2PFSFFTH

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Products specifications

Attribute name	Attribute value
Options	Hastelloy Trim (Poppet)	Body Material	316L Stainless Steel Double Melt
Outlet Pressure Rating	1-30 psig	Poppet Material	316L Stainless Steel
Flow Coefficient	0.15	Internal Leak Rate	4 x 10 -8 scc/sec He
Filter Material	Hastelloy C-22®	Maximum Inlet Pressure Rating	3500
Port Connection	Female, Female	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Diaphragm Material	Hastelloy C-22®
Number of Ports	2	Volume	0.49
Seat Material	PCTFE	Division	Veriflo Division
Port Type	1/4" Face Seal	Flow Coefficient (Cv)	0.15
Port Connection Type	1/4" Face Seal	Outlet Pressure	1-30 psig
Number of Ports	2	Port Connection	Female, Female
Body Material	316L Stainless Steel Double Melt

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