Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series

The 945Y Series Diaphragm Valve combines two valves into a single compact body, thus simplifying the integration of a purge system into a gas manifold and improving the effectiveness of the purge process. The series offers excellent leak integrity, high cycle life, and low particle generation from vacuum to 3,500 psig -- making it ideal for use in high-pressure UHP semiconductor applications, including gas cabinets, valve manifold boxes (VMBs), and upstream process lines.
The 945Y Series valve is available with a variety of manual operators and air operated (AOP) actuators. It is internally springless and thread less, which minimizes particle generation and entrapment, resulting in extreme cleanliness and reduced process contamination. The valve also features a unique compression member that loads the seal uniformly without the need for threaded components or crimping operations
The 945Y Series’ unique design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Wetted components are fabricated from Veriflo’s proprietary VeriClean™ 316L internally electropolished stainless steel. Seat materials are available in PCTFE, PEEK® and Vespel®, which allow the valve to accommodate a wide range of hazardous and inert process fluids. The diaphragm of the valve is made from a high-strength cobalt-based alloy. These materials, combined with the 945Y Series exacting design features, afford it exceptional corrosion resistance, reliability, and cleanliness at extremely high inlet pressures.
The 945Y Series is offered in several flow path configurations to accommodate upstream, downstream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. Air-operated valves can be configured to provide open-close position indication with a limit switch.
All 945Y valves are fabricated in a Class 100 cleanroom. The internal (seats) seals and metal external seals are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features/Benefits:
• Y-valve configuration allows for a mix of operator combinations and reduces space requirements
• 10 micro inch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and thread less design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 3,500
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure
• Cv 0.25 (HP, NC, NO, I), Cv 0.18 (M), Cv 0.17 purge valve

Vespel – TM DuPont Performance Elastomers L.L.C.
VeriClean – TM Parker Hannifin Corporation, Veriflo Division
PEEK − TM Victrex plc.