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Series II Standard Mass Flow Controller
*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.
Parker's highly precise mass flow controllers provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability. Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow controller is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus. If you're not sure what gas you're going to use or your process changes, our MFC allows you to migrate to a new gas within your flow range without purchasing a new mass flow controller.
Markets:
• Laboratory and Process Instrumentation
• Pharma/Bio-Pharma Equipment
• Air Quality Monitoring System
• Furnace and Coatings
Features/Benefits:
• Fast, Repeatable and Reliable Performance
• Premium Accuracy with Proven Thermal Mass Flow Sensor and Laminar Flow Element
• Easy to integrate into your new or existing systems
• Asset calibration management software included
• Cleaned for analytical use
• Fails shut with Normally Closed Valve for safe operation
• CE, REACH and RoHS II
Applications:
• Gas Control for Laboratory and Process Equipment
• Burner Ratio Control for Ceramics and Metals
• Process and Environmental Analyzers
• Emissions Monitors and Calibrators
| Action | Part No. | Availability | Partner Available | Price | Valve Type | Connection Type | Maximum Operating Temperature | Body Material | Connection Size | Division | Minimum Operating Temperature | Leak Rate | Repeatability | Turndown Ratio | Wetted Material | Flow Rate Accuracy | Specifications Met | Electrical Connection | Temperature Coefficient | Warm-Up Time | Seal Material | Settling Time | Surface Finish | Control Stability | Power Consumption | Connection Material | Attitude Sensitivity | Power Supply Voltage | Pressure Coefficient | Pressure Control Range | Communication Interface | Flow Rate |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 601AVREFD33V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 6 mm | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 0 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREFD44V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 12 mm | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 0 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREFD55V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 1/2" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 0 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREFD88V | Quote Required | TBD | Normally Open | Face Seal Male | 70 | 316L Stainless Steel | 1/4" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 0 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREFD99V | Quote Required | TBD | Normally Open | Other | 70 | 316L Stainless Steel | Other | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 0 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD00V | Quote Required | TBD | Normally Open | None | 70 | 316L Stainless Steel | None | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD22V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 1/4" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD33V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 6 mm | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD44V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 12 mm | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD55V | Quote Required | TBD | Normally Open | Compression | 70 | 316L Stainless Steel | 1/2" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD88V | Quote Required | TBD | Normally Open | Face Seal Male | 70 | 316L Stainless Steel | 1/4" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVREGD99V | Quote Required | TBD | Normally Open | Other | 70 | 316L Stainless Steel | Other | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + DeviceNet 4 to 20 mA Sourcing | 30 - 100 | ||
| 601AVRMAD00V | Quote Required | TBD | Normally Closed | None | 70 | 316L Stainless Steel | None | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMAD22V | Quote Required | TBD | Normally Closed | Compression | 70 | 316L Stainless Steel | 1/4" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMAD33V | Quote Required | TBD | Normally Closed | Compression | 70 | 316L Stainless Steel | 6 mm | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMAD44V | Quote Required | TBD | Normally Closed | Compression | 70 | 316L Stainless Steel | 12 mm | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMAD55V | Quote Required | TBD | Normally Closed | Compression | 70 | 316L Stainless Steel | 1/2" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMAD88V | Quote Required | TBD | Normally Closed | Face Seal Male | 70 | 316L Stainless Steel | 1/4" | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMAD99V | Quote Required | TBD | Normally Closed | Other | 70 | 316L Stainless Steel | Other | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 5 Vdc | 30 - 100 | ||
| 601AVRMBD00V | Quote Required | TBD | Normally Closed | None | 70 | 316L Stainless Steel | None | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | < 0.2% Reading | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 9-PIN D-CONNECTOR | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | 30 min. for optimum accuracy 2 min. for accuracy ±2% Full Scale | Viton (Standard) | Standard: 2 - 4 seconds | 0.8 µm typical | < ±0.1% Full Scale (typical for 1 l/min N2) | Max. 320 mA; Add 50 mA Profibus, if applicable | 316L Stainless Steel | Max. error at 90° off horizontal 0.2% at 1 ATM, typical N2 | +15 - 24 Vdc | 0.1 ATM typical N2; 0.01% / ATM typical H2 | 928 PSIA | RS232 + Modbus - RTU 0 to 10 Vdc | 30 - 100 |
