*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Parker FR1015D9V2PFS6MMTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

AFP Availability:	Quote Required
Partner Available:	Quote Required

Brand Parker

Part No. FR1015D9V2PFS6MMTH

Products specifications

Attribute name	Attribute value
Number of Ports	2	Maximum Inlet Pressure Rating	3500
Division	Veriflo Division	Seat Material	PCTFE
Filter Material	Hastelloy C-22®	Port Type	3/8" Face Seal
Body Material	316L Stainless Steel Double Melt	Operating Temperature	-40°F to 150°F (-40°C to 66°C)
Volume	0.49	Options	Hastelloy Trim (Poppet)
Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)	Poppet Material	316L Stainless Steel
Port Connection	Male, Male	Flow Coefficient	0.09
Diaphragm Material	Hastelloy C-22®	Internal Leak Rate	4 x 10 -8 scc/sec He
Outlet Pressure Rating	5-150 psig	Body Material	316L Stainless Steel Double Melt
Number of Ports	2	Port Connection	Male, Male
Flow Coefficient (Cv)	0.09	Port Connection Type	3/8" Face Seal
Outlet Pressure	5-150 psig

Product resources

Literature and Reference Materials