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Parker FR1003D15V2PFS6MMTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D15V2PFS6MMTH

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Products specifications

Attribute name	Attribute value
Diaphragm Material	Hastelloy C-22®	Port Connection	Male, Male
Number of Ports	2	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Flow Coefficient	0.15	Poppet Material	316L Stainless Steel
Volume	0.49	Division	Veriflo Division
Seat Material	PCTFE	Options	Hastelloy Trim (Poppet)
Filter Material	Hastelloy C-22®	Internal Leak Rate	4 x 10 -8 scc/sec He
Body Material	316L Stainless Steel Double Melt	Outlet Pressure Rating	1-30 psig
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Port Type	3/8" Face Seal
Maximum Inlet Pressure Rating	3500	Body Material	316L Stainless Steel Double Melt
Outlet Pressure	1-30 psig	Number of Ports	2
Port Connection	Male, Male	Port Connection Type	3/8" Face Seal
Flow Coefficient (Cv)	0.15

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