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Parker FR1001S9K2PFSMM - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1001S9K2PFSMM

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Products specifications

Attribute name	Attribute value
Volume	0.49	Seat Material	PCTFE
Division	Veriflo Division	Body Material	316L Stainless Steel
Outlet Pressure Rating	1-10 psig	Diaphragm Material	Hastelloy C-22®
Number of Ports	2	Port Type	1/4" Face Seal
Filter Material	Hastelloy C-22®	Poppet Material	316L Stainless Steel
Internal Leak Rate	4 x 10 -8 scc/sec He	Maximum Inlet Pressure Rating	3500
Flow Coefficient	0.09	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Port Connection	Male, Male	Options	na
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Number of Ports	2
Flow Coefficient (Cv)	0.09	Outlet Pressure	1-10 psig
Port Connection	Male, Male	Body Material	316L Stainless Steel
Port Connection Type	1/4" Face Seal

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