Ultra-High Purity (UHP) Tied-diaphragm Pressure Regulator – SQ2Micro Series

The SQ2Micro (0.06 Cv) and SQ2Micro130E (0.15 Cv) are the most advanced miniature UHP pressure regulators on the market. The series provide extremely precise and reliable pressure control that enhances MFC (Mass Flow Controller) performance vital to semiconductor production repeatability and yield. The series also exhibit superior leak integrity and low particle generation for reduced process contamination essential to semiconductor applications.
The regulators are suitable for use with both inert and corrosive gases, and provide extraordinary response to step-function flow demand changes. The series utilizes a unique self-centering tied-diaphragm design that provides reliable seat sealing and pressure regulation. Particle generation and entrapment is minimized by eliminating the poppet spring and seat retention threads which further improves process cleanliness and purging performance.
The SQ2Micro Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance, leak integrity, and maximum cycle life at inlet pressure up to 250 psig. The body is internally electropolished and manufactured from Parker Veriflo’s proprietary VeriClean™ 316L stainless steel that exceeds Semi F20 material requirements, each diaphragm and poppet are manufactured from Hastelloy C-22®, and each seat is available in either PCTFE or Vespel®.
Both the SQ2Micro and SQ2Micro130E feature a small footprint for the same spacing as Veriflo valves. An A-style body is available with an internal face seal low pressure port for pressure gauge and transducer installations. For surface mount applications refer to the SMSQ2Micro Series.
All SQ2Micro and SQ2Micro130E regulators are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, the internal (seat) seal and external metal seals are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
•    Semiconductor
•    Analytical Laboratory
•    Pharmaceutical
•    BioPharm
•    Aerospace
•    Industrial

Applications:
•    Corrosive and specialty gases
•    Semiconductor Tools
•    Tool Hook-ups
•    Gas Cabinets
•    Valve Manifold Boxes (VMB)
Features and Benefits:
•    Extremely low particle counts
•    Tied-diaphragm eliminates springs in wetted area and enhances safety
•    0.06 Cv for SMSQ2Micro, 0.15 Cv for SMSQ2Micro130E
•    Outlet pressures range from -10 psig to 60 psig
•    Internal leak rate: ≤ 5 x 10-8 scc/sec He
•    External leak rate: ≤ 2 x 10-10 scc/sec He
•    5 micro inch (Ra) electropolish surface finish
•    -40°F to +150° F (-40°C to +66°C) operating temperature range

VeriClean – TM Parker Hannifin Corporation, Veriflo Division
Vespel – TM DuPont Performance Elastomers L.L.C.
Hastelloy C-22 -TM Haynes International, Inc.