Ultra-High Purity (UHP) Low Flow/Pressure Diaphragm Valve Manifold – 930Y Series

The Parker 930Y Series diaphragm Y-valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications. 

The 930Y Series’ thread-less and spring-less design minimizes particle generation and entrapment areas for reduced process contamination.  The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life over millions of cycles. All wetted components are manufactured from specialty metals to provide exceptional corrosion resistance and leak integrity. The internally electropolished VeriClean™ 316L stainless steel body and high strength Cobalt based alloy diaphragm allow it to surpass the industry standard Semi F20 specification. The variety of available seat materials: PCTFE, PEEK® and Vespel® to allow the 930Y series to operate at many different temperatures and with a wide range of process fluids.  These materials combined with the product’s exacting design features afford the 930Y Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 300 psig. 

The 930Y Series is offered in several flow path configurations to accommodate up-stream, down-stream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. 

All 930Y Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
•Semiconductor
•Analytical Laboratory
•Pharmaceutical
•BioPharm
•Aerospace
•IndustriaL

Applications:
•Corrosive and specialty gases
•Semiconductor Tools
•Tool Hook-ups
•Gas Cabinets
•Valve Manifold Boxes (VMB)

Features/Benefits:
•5 microinch (Ra) electropolish surface finish
•High cycle life (including corrosive service)
•Internally springless and thread less design minimizes particle generation and gas entrapment
•Fully functional from vacuum to 300 psig (manual) and 125 psig (air-operated)
•Internal leak rate: ≤ 1 x 10-9 scc/sec He
•External leak rate: ≤ 2 x 10-10 scc/sec He
•75 psig nominal AOP actuation pressure

VeriClean – TM Parker Hannifin Corporation, Veriflo Division

Vespel – TM DuPont Performance Elastomers L.L.C.

Peek – TM Victrex plc.