Ultra-High Purity (UHP) High-flow, High-pressure Diaphragm Valve – 18R Series

The Parker 18R Series Spring-type Stainless Steel Diaphragm Valve offers high cycle life and provides positive shut off for high-flow bulk delivery and specialty gas systems. It can be manually or air-operated and is designed for use in ultra-high purity semiconductor manufacturing applications where leak integrity and cleanliness are critical to success.

18R Series valves are fabricated from special materials to provide exceptional corrosion resistance and leak integrity.The body and lower stem of 18R Series valves are manufactured from Veriflo’s proprietary VeriClean™ low sulfur, 316L stainless steel and is internally electropolished. The diaphragm is a high-strength cobalt-based alloy. Seat materials are available in PCTFE (std) or Polyimide, which allow the 18R Series to be used with a variety of process fluids, including both corrosives and inerts. Combined with the valve’s exacting design features, which control seat and diaphragm stresses to provide a maintenance-free service life, these specialty metals afford the 18R Series with exceptional corrosion resistance and excellent reliability at working pressures up to 1,500 psig for manual configurations and 1,200 psig for air-operated configurations.

All 18R Series valves are fabricated in a Class 100 cleanroom. The internal (seat) seal and metal external seal are Helium leak tested using a mass spectrometer. In addition, they are production leak tested using an outboard sniffer probe at 1,000 – 1,500 psig to ensure performance in high-flow, high-pressure UHP semiconductor manufacturing applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Bulk specialty gas systems (BSGS)
• Bulk delivery systems
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features/Benefits:
• Provides high flow and positive shut off for UHP fluid systems
• 10 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Fully functional from vacuum to 1,500 psig (manual), 1,200 psig (air-operated)
• Internal leak rate: < 4 x 10-9 scc/sec He
• External leak rate: < 1 x 10-9 scc/sec He
• Production leak tested using an outboard sniffer probe at 1,000 – 1,500 psig
• Can be manually (1.30 Cv) or air-operated (1.00 Cv)

VeriClean™ is a trademark of Parker Hannifin Corporation