Ultra-High Purity (UHP) High Flow Diaphragm Valve – 970 Series

The Parker 970 provides high flow and superior leak integrity, making it ideal for use in ultra-high purity semiconductor tool applications, including gas boxes, gas cabinets, and valve manifold boxes (VMBs).

The 970 Series design has no internally wetted threads or springs which minimizes particle generation and particle entrapment for reduced process contamination.  The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life in taxing applications. The 970 Series wetted components are fabricated from specialty materials to provide exceptional corrosion resistance and leak integrity. The internally electropolished body is manufactured from Parker’s proprietary UHP grade 316L stainless steel, Vericlean™. The diaphragm is a high strength Cobalt based alloy to maximize product life and the PCTFE, PEEK®, or Vespel® seat provides excellent chemical compatibility along with a robust shut-off performance.
The 970 series diaphragm valve offers high flow, .70 Cv, in a compact package, which makes it suitable for use in situations where workable space is limited, such as gas boxes, gas cabinets, and valve manifold boxes (VMBs). It can be manually, or air operated with a maximum operating pressure of 250 and 150 psig respectively.
All 970 Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features/Benefits:
• 5 micro inch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and thread less design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• Flow Capacity: .7

VeriClean – TM Parker Hannifin Corporation, Veriflo Division
Vespel – TM DuPont Performance Elastomers L.L.C.
PEEK – TM Victrex plc.