UHP Stainless Steel Tied-diaphragm Valve (up to 300 psig) – 935 Series

The Parker 935 Series offers excellent leak integrity and gas containment capabilities, making it ideal for use in high-flow UHP bulk gas semiconductor applications.

Featuring a tied-diaphragm design that provides reliable positive stem retraction, the 935 Series is internally springless and thread less; thus, reducing surface area and entrapment areas to improve purge ability and particle generation.
The 935 Series wetted components are fabricated from specialty materials to provide exceptional corrosion resistance and leak integrity: the internally electropolished body is manufactured from Parker’s proprietary UHP grade 316L stainless steel, Vericlean™ to maximize corrosion resistance, the 316L stainless steel domed tied-diaphragm creates a metal-to-metal seal with the proprietary VeriClean™ body and allows for maximum stroke by maintaining low stresses throughout its range of motion, and the PCTFE, or Vespel® seat provides excellent chemical compatibility along with a robust shut-off performance.

All 935 Series valves are cleaned to exacting semiconductor industry requirements and assembled in class 100 cleanroom environments. Prior to shipping, all valve seals (seat, and diaphragm) are 100% Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Fluid & gas handling
• Process control
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Gas distribution systems
• Bulk Specialty Gas Systems (BSGS)

Features and Benefits:
• Standard surface finish of 10 micro inch Ra
• Fully functional from vacuum to 300 psig
• Open/Close valve position indicator
• Internal leak rate: ≤4 x 10-9 scc/sec He
• External leak rate: ≤2 x 10-10 scc/sec He
• Flow Capacity (Cv): 2.8

Vespel – TM DuPont Performance Elastomers L.L.C.
VeriClean – TM Parker Hannifin Corporation, Veriflo Division