UHP Single Stage Pressure Reducing Regulator - FR1000 Series

Veriflo Division’s FR1000 Series are non-tied diaphragm, pressure reducing regulators that offer low to intermediate flow capability with an inlet pressure up to 3500 psig. The FR1000 provides precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many semiconductor manufacturing applications.
The standard Hastelloy C-22® diaphragm and integrated filtration promote long life performance while the metal-to-metal diaphragm seal assures high leak integrity.
The FR1000 offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new line complements our current, premium QR4000 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Manufacturing
• Gas Companies
• Analytical Laboratory
• Industrial
• Pharmaceutical
• BioPharm

Features/Benefits:
• Metal-to-Metal Diaphragm Seal assures high leak integrity
• Manufactured for ultra high purity gas delivery applications
• 10 μ inch Ra Surface Finish
• Passivated & Electropolished
• Integrated Filtration
• Hastelloy® diaphragm standard
• Flow capacity: 0.09 & 0.15 Cv

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Process Gas Cabinets
• “Point of Use” pressure regulation