UHP Single Stage, High Flow, Pressure Reducing Regulator - FR1300 Series

Veriflo Division’s FR1300 Series regulators are single stage, pressure reducing regulators that offer high flow capability with an inlet pressure up to 600 psig. They are an excellent choice for cylinder or point of use bulk gas applications.
The standard Hastelloy C-22® diaphragm provides stable control over its full operational range while the metal-to-metal diaphragm seal assures high leak integrity.
The FR1300 Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. The new line complements our current, premium HF1200 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.

Markets:
• Semiconductor Fab Installations
• Gas Companies

Product Features:
• 316L stainless steel body
• Manufactured for ultra high purity semiconductor gas applications
• Metal-to-metal diaphragm seal
• 10 μ in. Ra surface finish
• Passivated & electropolish
• Hastelloy C-22® diaphragm standard
• Flow capacity: 1.2 Cv
• Flows up to 1200 slpm (42 scfm)

Applications:
• Tool Hook-Up
• “Point of Use” pressure regulation

Hastelloy® is a registered trademark of Haynes International, Inc.