UHP PFA Manual Diaphragm (1/2 inch) 3 Way Valve – MV-11 Series

The MV-11 Series is a 1/2 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance. With a multi-position mounting base, the 3-way configuration allows for increased mounting flexibility and connector fitting reduction, making it advantageous in areas where workable space is limited.

The MV-11 Series PFA valve features a Fluoropolymer-coated stainless steel spring which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valve is also equipped with a one-piece machine modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. For increased flexibility, MV-11 Series valves can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.

The tongue and groove seal of the MV-11 Series valve ensures a positive diaphragm to body seal, resulting in high cycle life. Its full 1/2 inch orifice offers maximum flow capability in a compact package. Flow capacities vary depending on port size and configuration type (up to 3.7 Cv).

The MV-11 Series PFA valve is available with a submergible option, which isolates components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Available in 3-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Full ½ inch orifice provides maximum flow capability in a compact package
• Fully functional from vacuum to 100 psig
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)