UHP Metal Face Seal Fittings

Parker Veriflo’s SEMI F20 material grade UHP Metal Face Seal Fittings, Glands, Caps & Nuts provide cost effective solutions and guarantee Parker’s quality, reliability and performance.
Parker Metal Face Seal Fittings are designed for critical applications where ultrahigh purity conditions are required. The mating gasket and toroid design provide a high integrity metal-to-metal seal for reliable service from vacuum to positive pressure. Standard finish metal face seal fittings have an internal surface roughness average of 10 ?in. (0.25?m) Ra. PE finished fittings have an internal surface roughness average of 5 ?in. (0.13?m) Ra and UHP wetted surface condition.
Parker uses a Patented TorqTite™ gasket that initially contacts on the inner taper, radially forcing out any entrapped contaminants, and a smooth transition into the Internal Diameter minimizes entrapment areas.
The UHP Metal Face Seal Fittings line allows Parker to compete in fab applications at a competitive price point and complements Parker’s current VacuSeal and Mini buttweld lines whose robust design works best for critical applications at the semiconductor tool.

Markets:
• Semiconductor Fabrication

Features/Benefits:
• Compact Design allows for system miniaturization and close coupled spacing
• Material traceability via permanently marked heat codes on each wetted component
• Permanent product designation identifies manufacturer, material and internal finish when applicable
• Enhanced female nut silver plating promotes consistent easy assembly
• Controlled wetted surfaces meet stringent ultra high purity system requirements by preventing outgassing and inhibiting corrosion
• Patented Torqtite™ gasket promotes sealing of damaged toroids and virtually eliminates assembly loosening due to vibration or thermo-cycling

Applications:
• Tool Hook-Up
• Valve Manifold Boxes
• Gas Cabinets