UHP High-flow Tied-diaphragm Pressure Regulator (up to 3/4 inch) – FR1200 Series

The Parker FR1200 Series is a single stage, pressure reducing regulator that offers high flow capabilities (up to 1,200 slpm) at inlet pressures up to 1,700 psig. The regulator features a large, tied Hastelloy C-22® diaphragm, which provides a robust seal for hazardous gas applications. The large effective area of the diaphragm gives the FR1200 Series an extremely low spring rate, affording it high sensitivity and stable control over its full operational range. The regulator is ideally suited for use in ultra-high purity (UHP) semiconductor tool applications, including point of use bulk and specialty gas delivery systems.

The body of the FR1200 Series pressure regulator is fabricated from 316L stainless steel. This, coupled with a PCTFE seat and electropolished and passivated finish, provide it with high cycle life, superior corrosion resistance, and compatibility with a wide range of aggressive process media.

The tied-diaphragm design of the FR1200 Series increases safety in the event of a seat leak.

The FR1200 is available in single and double melt body styles. Depending on customer system requirements, the regulator can be fitted with a variety of connection types and sizes, including male and female face seals and tube stubs. Connection sizes range from 3/8 inch to 3/4 inch ant ¼ for gauges.

100% of FR1200 Series pressure reducing regulators are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in ultra-high purity applications, where cleanliness and leak integrity are of the utmost importance.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Offers high flow in a compact package
• Capable of operating at flows up to 1,200 slpm (42 scfm)
• Flow capacity: 1.2 Cv
• Single and double melt body styles available
• 10 microinch Ra surface finish
• Fully functional at pressure up to 1,700 psig
• Tied diaphragm enhances safety
• Internal leak rate: ≤4 x 10-8 scc/sec He
• External leak rate: ≤2 x 10-10 scc/sec He
• Can be surface or panel-mounted

Applications:
• Corrosive and specialty gases
• Bulk gas delivery systems
• Gas cabinets
• Tool Hook-Up

Hastelloy® is a registered trademark of Haynes International, Inc.