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Series II Standard Mass Flow Meter
*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.
Parker's highly precise mass flow meters provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability. Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow meter is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus. If you're not sure what gas you're going to use or your process changes, our MFM allows you to migrate to a new gas within your flow range without purchasing a new mass flow meter.
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| Action | Part No. | Availability | Partner Available | Price | Maximum Operating Temperature | Body Material | Division | Minimum Operating Temperature | Leak Rate | Warm-Up Time | Repeatability | Surface Finish | Turndown Ratio | Wetted Material | Power Consumption | Flow Rate Accuracy | Specifications Met | Connection Material | Attitude Sensitivity | Power Supply Voltage | Pressure Coefficient | Electrical Connection | Pressure Control Range | Temperature Coefficient |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 511BHAAD22V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHAGD11V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHAGD22V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHBAD88V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHBBD88V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHBFD22V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHBGD00V |
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHBGD11V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDAD00V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDAD22V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDAD33V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDAD88V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDFD00V |
Quote Required
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDGD11V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHDGD33V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHEBD11V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHEBD22V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHEBD33V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHEFD22V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C | ||
| 511BHMAD11V |
Quote Required
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TBD
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70 | 316L Stainless Steel | Precision Fluidics Division | -10 | Tested < 2 x 10-9 mbar l/s He | 30 min. for optimum accuracy<br/>2 min. for accuracy ±2% Full Scale | < 0.2% Reading | 0.8µm typical | 1 : 50 (in digital mode up to 1 : 187.5) | 316L Stainless Steel | 70 mA; Add 50 mA Profibus, if applicable | Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min) | IP40 | 316L Stainless St eel | Max. error at 90° off horizontal 0.2% at I ATM, typical N2 | +15 - 24 | 0.1% / ATM typical N2; 0.01% / ATM typical H2 | 9-PIN D-CONNECTOR | 1450 PSIA | Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C |
