Series II Standard Mass Flow Controller

Picture for category Series II Standard Mass Flow Controller

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Parker's highly precise mass flow controllers provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability.  Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow controller is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus.  If you're not sure what gas you're going to use or your process changes, our MFC allows you to migrate to a new gas within your flow range without purchasing a new mass flow controller.

Markets:
• Laboratory and Process Instrumentation
• Pharma/Bio-Pharma Equipment
• Air Quality Monitoring System
• Furnace and Coatings

Features/Benefits:
• Fast, Repeatable and Reliable Performance
• Premium Accuracy with Proven Thermal Mass Flow Sensor and Laminar Flow Element
• Easy to integrate into your new or existing systems
• Asset calibration management software included
• Cleaned for analytical use
• Fails shut with Normally Closed Valve for safe operation
• CE, REACH and RoHS II

Applications:
• Gas Control for Laboratory and Process Equipment
• Burner Ratio Control for Ceramics and Metals
• Process and Environmental Analyzers
• Emissions Monitors and Calibrators

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ActionPart No.AvailabilityPartner AvailablePriceValve TypeMinimum Operating TemperatureMaximum Operating TemperatureBody MaterialDivisionLeak RateRepeatabilityTurndown RatioWetted MaterialFlow Rate AccuracySpecifications MetElectrical ConnectionTemperature CoefficientConnection TypeWarm-Up TimeSeal MaterialSettling TimeSurface FinishConnection SizeControl StabilityPower ConsumptionConnection MaterialAttitude SensitivityPower Supply VoltagePressure CoefficientPressure Control RangeCommunication InterfaceFlow Rate
601AVRAAD00V
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Normally Closed-10 °C70 °C316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °CNone30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typicalNone< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 5 Vdc30 - 100 L/min
601AVRAAD22V
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Normally Closed-10 °C70 °C316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/4"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 5 Vdc30 - 100 L/min
601AVRAAD33V
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical6 mm< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc30 - 100
601AVRAAD44V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical12 mm< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc30 - 100
601AVRAAD55V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/2"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc30 - 100
601AVRAAD88V
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Normally Closed-10 °C70 °C316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °CFace Seal Male30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/4"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 5 Vdc30 - 100 L/min
601AVRAAD99V
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °COther30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typicalOther< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc30 - 100
601AVRABD00V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CNone30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typicalNone< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc30 - 100
601AVRABD22V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/4"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc30 - 100
601AVRABD33V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical6 mm< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc30 - 100
601AVRABD44V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical12 mm< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc30 - 100
601AVRABD55V
Quote Required
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Normally Closed-10 °C70 °C316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/2"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 10 Vdc30 - 100 L/min
601AVRABD88V
Quote Required
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Normally Closed-10 °C70 °C316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °CFace Seal Male30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/4"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 10 Vdc30 - 100 L/min
601AVRABD99V
Quote Required
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Normally Closed-10 °C70 °C316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °COther30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typicalOther< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 10 Vdc30 - 100 L/min
601AVRAFD00V
Quote Required
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Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CNone30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typicalNone< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing30 - 100
601AVRAFD22V
Quote Required
TBD
Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/4"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing30 - 100
601AVRAFD33V
Quote Required
TBD
Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical6 mm< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing30 - 100
601AVRAFD44V
Quote Required
TBD
Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical12 mm< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing30 - 100
601AVRAFD55V
Quote Required
TBD
Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CCompression30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/2"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing30 - 100
601AVRAFD88V
Quote Required
TBD
Normally Closed-1070316L Stainless SteelPrecision Fluidics DivisionTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °CFace Seal Male30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical1/4"< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing30 - 100