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Series II Standard Mass Flow Controller

Picture for category Series II Standard Mass Flow Controller

*PRODUCT IMAGE IS REPRESENTATIVE PROVIDED BY THE MANUFACTURER. DO NOT MAKE BUYING DECISIONS SOLEY BASED ON THE IMAGE. PLEASE VERIFY SPECIFICATIONS MEET YOUR REQUIREMENTS.

Parker's highly precise mass flow controllers provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability.  Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow controller is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus.  If you're not sure what gas you're going to use or your process changes, our MFC allows you to migrate to a new gas within your flow range without purchasing a new mass flow controller.

Markets:
• Laboratory and Process Instrumentation
• Pharma/Bio-Pharma Equipment
• Air Quality Monitoring System
• Furnace and Coatings

Features/Benefits:
• Fast, Repeatable and Reliable Performance
• Premium Accuracy with Proven Thermal Mass Flow Sensor and Laminar Flow Element
• Easy to integrate into your new or existing systems
• Asset calibration management software included
• Cleaned for analytical use
• Fails shut with Normally Closed Valve for safe operation
• CE, REACH and RoHS II

Applications:
• Gas Control for Laboratory and Process Equipment
• Burner Ratio Control for Ceramics and Metals
• Process and Environmental Analyzers
• Emissions Monitors and Calibrators

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ActionPart No.AvailabilityPartner AvailablePriceValve TypeMinimum Operating TemperatureConnection TypeMaximum Operating TemperatureBody MaterialDivisionConnection SizeLeak RateRepeatabilityTurndown RatioWetted MaterialFlow Rate AccuracySpecifications MetElectrical ConnectionTemperature CoefficientWarm-Up TimeSeal MaterialSettling TimeSurface FinishControl StabilityPower ConsumptionConnection MaterialAttitude SensitivityPower Supply VoltagePressure CoefficientPressure Control RangeCommunication InterfaceFlow Rate
601CVNAGD22V
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Normally Closed-10 °CCompression70 °C316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 4 to 20 mA Sourcing8 - 25 L/min
601CVNAGD33V
Quote Required
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Normally Closed-10Compression70316L Stainless SteelPrecision Fluidics Division6 mmTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 4 to 20 mA Sourcing8 - 25
601CVNAGD88V
Quote Required
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Normally Closed-10Face Seal Male70316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 4 to 20 mA Sourcing8 - 25
601CVNAGD99V
Quote Required
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Normally Closed-10Other70316L Stainless SteelPrecision Fluidics DivisionOtherTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 4 to 20 mA Sourcing8 - 25
601CVNBAD00V
Quote Required
TBD
Normally Open-10None70316L Stainless SteelPrecision Fluidics DivisionNoneTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc8 - 25
601CVNBAD11V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division1/8"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc8 - 25
601CVNBAD22V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc8 - 25
601CVNBAD33V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division6 mmTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc8 - 25
601CVNBAD88V
Quote Required
TBD
Normally Open-10 °CFace Seal Male70 °C316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He L/sec< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2 ATM928 PSIARS232 + Analog 0 to 5 Vdc8 - 25 L/min
601CVNBAD99V
Quote Required
TBD
Normally Open-10Other70316L Stainless SteelPrecision Fluidics DivisionOtherTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 5 Vdc8 - 25
601CVNBBD00V
Quote Required
TBD
Normally Open-10None70316L Stainless SteelPrecision Fluidics DivisionNoneTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc8 - 25
601CVNBBD11V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division1/8"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc8 - 25
601CVNBBD22V
Quote Required
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Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc8 - 25
601CVNBBD33V
Quote Required
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Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division6 mmTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc8 - 25
601CVNBBD88V
Quote Required
TBD
Normally Open-10Face Seal Male70316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc8 - 25
601CVNBBD99V
Quote Required
TBD
Normally Open-10Other70316L Stainless SteelPrecision Fluidics DivisionOtherTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 10 Vdc8 - 25
601CVNBFD00V
Quote Required
TBD
Normally Open-10None70316L Stainless SteelPrecision Fluidics DivisionNoneTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing8 - 25
601CVNBFD11V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division1/8"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing8 - 25
601CVNBFD22V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division1/4"Tested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing8 - 25
601CVNBFD33V
Quote Required
TBD
Normally Open-10Compression70316L Stainless SteelPrecision Fluidics Division6 mmTested < 2 x 10-9 mbar l/s He< 0.2% Reading1 : 50 (in digital mode up to 1 : 187.5)316L Stainless SteelStandard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)IP409-PIN D-CONNECTORZero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C30 min. for optimum accuracy 2 min. for accuracy ±2% Full ScaleViton (Standard)Standard: 2 - 4 seconds0.8 µm typical< ±0.1% Full Scale (typical for 1 l/min N2)Max. 320 mA; Add 50 mA Profibus, if applicable316L Stainless SteelMax. error at 90° off horizontal 0.2% at 1 ATM, typical N2+15 - 24 Vdc0.1 ATM typical N2; 0.01% / ATM typical H2928 PSIARS232 + Analog 0 to 20 mA Sourcing8 - 25