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Parker SM930MS102 - Ultra-High Purity (UHP) Surface Mount Diaphragm Valve - SM930 Series

The SM930 Series surface mount valve provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor tool applications requiring flow capacities up to 0.30 Cv and operating pressures up to 250 psig

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Brand Parker

Part No. SM930MS102

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Products specifications

Attribute name	Attribute value
Division	Veriflo Division	Port Type	1 1/8" C-Seal
Porting	2-port	Maximum Operating Pressure (psig)	250
Actuation	Mini-Lever

Product resources

Literature and Reference Materials

Veriflo CAD File Locator Guide (PDF)
Veriflo Product Selection & Operation Safety Guide (PDF)