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Parker FR1406HD5V2PFS8MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications

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Brand Parker

Part No. FR1406HD5V2PFS8MM

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Products specifications

Attribute name	Attribute value
Internal Leak Rate	4 x 10-8 scc/sec He	Outlet Pressure Rating	5-60 psig
Seat Material	PCTFE	Division	Veriflo Division
Diaphragm Material	Hastelloy C-22®	Number of Ports	2
Flow Coefficient	0.5	Port Connection	Male, Male
External Leak Rate	2 x 10-10 scc/sec He	Body Material	316L Stainless Steel Double Melt
Proof Pressure	4,500 psig	Seat Retainer Material	316L SS, Hastelloy C-22®
Burst Pressure	9,000 psig	Port Type	1/2" Face Seal
Poppet Material	Hastelloy C-22®	Maximum Inlet Pressure Rating	3000
Number of Ports	2	Flow Coefficient (Cv)	0.5
Body Material	316L Stainless Steel Double Melt	Port Connection Type	1/2" Face Seal
Seat Material	PCTFE	Outlet Pressure	5-60 psig
Port Connection	Male, Male	Maximum Inlet Pressure (psig)	3000

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