Parker FR1406HD5V2PFS6MM - FR1400

The FR1400 is an ultrahigh purity, tied diaphragm, regulator for high pressure gas delivery in semiconductor and other clean processes. Capable of high flow, it is an excellent choice for cylinder or point of use bulk and specialty gas applications
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Brand Parker
Part No. FR1406HD5V2PFS6MM
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Products specifications
Attribute nameAttribute value
Number of Ports2Port ConnectionMale, Male
Flow Coefficient0.5Diaphragm MaterialHastelloy C-22®
Burst Pressure9,000 psigDivisionVeriflo Division
Seat Retainer Material316L SS, Hastelloy C-22®Seat MaterialPCTFE
Outlet Pressure Rating5-60 psigProof Pressure4,500 psig
Maximum Inlet Pressure Rating3000Body Material316L Stainless Steel Double Melt
External Leak Rate2 x 10-10 scc/sec HePort Type3/8" Face Seal
Internal Leak Rate4 x 10-8 scc/sec HePoppet MaterialHastelloy C-22®
Body Material316L Stainless Steel Double MeltFlow Coefficient (Cv)0.5
Seat MaterialPCTFENumber of Ports2
Maximum Inlet Pressure (psig)3000Port ConnectionMale, Male
Outlet Pressure5-60 psigPort Connection Type3/8" Face Seal
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