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Parker FR1003S15K2PFS6FF - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003S15K2PFS6FF

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Products specifications

Attribute name	Attribute value
Number of Ports	2	Diaphragm Material	Hastelloy C-22®
Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)	Options	na
Poppet Material	316L Stainless Steel	Volume	0.49
Division	Veriflo Division	Seat Material	PCTFE
Body Material	316L Stainless Steel	Outlet Pressure Rating	1-30 psig
Internal Leak Rate	4 x 10 -8 scc/sec He	Flow Coefficient	0.15
Filter Material	Hastelloy C-22®	Port Type	3/8" Face Seal
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Maximum Inlet Pressure Rating	3500
Port Connection	Female, Female	Outlet Pressure	1-30 psig
Number of Ports	2	Port Connection	Female, Female
Port Connection Type	3/8" Face Seal	Flow Coefficient (Cv)	0.15
Body Material	316L Stainless Steel

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