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Parker FR1003D9V2PFSMMTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D9V2PFSMMTH

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Products specifications

Attribute name	Attribute value
Filter Material	Hastelloy C-22®	Body Material	316L Stainless Steel Double Melt
Options	Hastelloy Trim (Poppet)	Outlet Pressure Rating	1-30 psig
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Flow Coefficient	0.09
Maximum Inlet Pressure Rating	3500	Diaphragm Material	Hastelloy C-22®
Port Type	1/4" Face Seal	Number of Ports	2
Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)	Port Connection	Male, Male
Internal Leak Rate	4 x 10 -8 scc/sec He	Poppet Material	316L Stainless Steel
Division	Veriflo Division	Volume	0.49
Seat Material	PCTFE	Port Connection	Male, Male
Port Connection Type	1/4" Face Seal	Body Material	316L Stainless Steel Double Melt
Flow Coefficient (Cv)	0.09	Outlet Pressure	1-30 psig
Number of Ports	2

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