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Parker FR1003D9V2PFSFFTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D9V2PFSFFTH

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Products specifications

Attribute name	Attribute value
Division	Veriflo Division	Port Type	1/4" Face Seal
Volume	0.49	Seat Material	PCTFE
Number of Ports	2	Diaphragm Material	Hastelloy C-22®
Body Material	316L Stainless Steel Double Melt	Internal Leak Rate	4 x 10 -8 scc/sec He
Filter Material	Hastelloy C-22®	Poppet Material	316L Stainless Steel
Maximum Inlet Pressure Rating	3500	Flow Coefficient	0.09
Port Connection	Female, Female	Outlet Pressure Rating	1-30 psig
Options	Hastelloy Trim (Poppet)	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Number of Ports	2
Body Material	316L Stainless Steel Double Melt	Flow Coefficient (Cv)	0.09
Port Connection	Female, Female	Outlet Pressure	1-30 psig
Port Connection Type	1/4" Face Seal

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