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Parker FR1003D9V2PFS6MMTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D9V2PFS6MMTH

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Products specifications

Attribute name	Attribute value
Flow Coefficient	0.09	Port Type	3/8" Face Seal
Operating Temperature	-40°F to 150°F (-40°C to 66°C)	Maximum Inlet Pressure Rating	3500
Port Connection	Male, Male	Number of Ports	2
Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)	Diaphragm Material	Hastelloy C-22®
Poppet Material	316L Stainless Steel	Volume	0.49
Division	Veriflo Division	Seat Material	PCTFE
Options	Hastelloy Trim (Poppet)	Outlet Pressure Rating	1-30 psig
Body Material	316L Stainless Steel Double Melt	Internal Leak Rate	4 x 10 -8 scc/sec He
Filter Material	Hastelloy C-22®	Port Connection	Male, Male
Outlet Pressure	1-30 psig	Number of Ports	2
Flow Coefficient (Cv)	0.09	Body Material	316L Stainless Steel Double Melt
Port Connection Type	3/8" Face Seal

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