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Parker FR1003D9V2PFS6FFTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D9V2PFS6FFTH

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Products specifications

Attribute name	Attribute value
Poppet Material	316L Stainless Steel	Division	Veriflo Division
Volume	0.49	Seat Material	PCTFE
Filter Material	Hastelloy C-22®	Internal Leak Rate	4 x 10 -8 scc/sec He
Body Material	316L Stainless Steel Double Melt	Options	Hastelloy Trim (Poppet)
Outlet Pressure Rating	1-30 psig	Operating Temperature	-40°F to 150°F (-40°C to 66°C)
Port Connection	Female, Female	Flow Coefficient	0.09
Port Type	3/8" Face Seal	Maximum Inlet Pressure Rating	3500
Diaphragm Material	Hastelloy C-22®	Number of Ports	2
Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)	Port Connection	Female, Female
Number of Ports	2	Port Connection Type	3/8" Face Seal
Body Material	316L Stainless Steel Double Melt	Flow Coefficient (Cv)	0.09
Outlet Pressure	1-30 psig

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