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Parker FR1003D15V2PFS6FFTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1003D15V2PFS6FFTH

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Products specifications

Attribute name	Attribute value
Maximum Inlet Pressure Rating	3500	Port Connection	Female, Female
Body Material	316L Stainless Steel Double Melt	Options	Hastelloy Trim (Poppet)
Outlet Pressure Rating	1-30 psig	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Port Type	3/8" Face Seal	Operating Temperature	-40°F to 150°F (-40°C to 66°C)
Division	Veriflo Division	Volume	0.49
Seat Material	PCTFE	Number of Ports	2
Diaphragm Material	Hastelloy C-22®	Internal Leak Rate	4 x 10 -8 scc/sec He
Filter Material	Hastelloy C-22®	Flow Coefficient	0.15
Poppet Material	316L Stainless Steel	Outlet Pressure	1-30 psig
Flow Coefficient (Cv)	0.15	Body Material	316L Stainless Steel Double Melt
Port Connection Type	3/8" Face Seal	Number of Ports	2
Port Connection	Female, Female

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